Plasma-polymerized organic films starting from aniline have been prepa
red. Characteristics of the films have been examined in detail using F
T-IR, X-ray photoelectron spectroscopy (XPS), near-IR to UV spectrosco
py and nuclear analysis techniques. While irradiation by 100 keV Ar+ i
ons at high fluence induces electrical conduction due to damage, dopin
g of the plasma-polymerized aniline film with 24 keV I+ implantation a
t a fluence of 1 x 10(16) ions/cm2 results in a decrease of electrical
resistivity by twelve orders of magnitude. A threshold-like dependenc
e of resistivity on the ion fluence has been found for the plasma-poly
merized film irradiated by 100 keV Ar+ ions, similar to conventional p
olymers.