AN ELECTROSTATIC SERVO-TYPE 3-AXIS SILICON ACCELEROMETER

Authors
JONO K MINAMI K ESASHI M
Citation
K. Jono et al., AN ELECTROSTATIC SERVO-TYPE 3-AXIS SILICON ACCELEROMETER, Measurement science & technology, 6(1), 1995, pp. 11-15
Citations number
13
Categorie Soggetti
Instument & Instrumentation",Engineering
Journal title
Measurement science & technology → ACNP
ISSN journal
09570233
Volume
6
Issue
1
Year of publication
1995
Pages
11 - 15
Database
ISI
SICI code
0957-0233(1995)6:1<11:AES3SA>2.0.ZU;2-T
Abstract
A three-axis capacitive accelerometer using an electrostatic servo sys tem was developed. In this system, the acceleration is decomposed into its axial components independently and simultaneously by using synchr onous demodulation. To reduce the off-axis response, an electrostatic force-balancing principle was used in order to keep the seismic mass i n the original position. Typical results achieved for off-axis sensiti vity were 1.3-7.3%.