DESIGN OF AN ELEGANT AND INEXPENSIVE MULTIPLE-TARGET HOLDER AND LASER-BEAM SCANNER FOR USE IN LASER-ABLATION DEPOSITION OF THIN-FILMS

In thin film deposition by laser ablation it is often important to rot ate the target and to raster the laser beam across the target during a blation to prevent excessive surface damage. A simple multiple-target holder, which allows individual target rotation and in vacuo target in terchange, is presented. We also describe a method of rastering the la ser beam.