STRUCTURAL, OPTICAL AND ELECTRICAL-PROPERTIES OF STATE-OF-THE-ART CUBIC SIC FILMS

The structural, optical and electrical characteristics of commercially available cubic (beta)-SiC films grown on [001] silicon waters were r eported. For the structural characterization, combined plane view and cross-section transmission electron spectroscopy observations were mad e. For the optical investigations, low-temperature photoluminescence ( 2 K) and room temperature Raman and infrared spectra were measured. Fo r the electrical characterization, Hall effect and resistivity measure ments were performed in the temperature range 15-500 K.