NMR-STUDIES OF HYDROGEN MICROSTRUCTURES IN HYDROGENATED AMORPHOUS-SILICON FILMS

Authors
QU XX CHEN KJ CHEN MR HU C LI ZF FENG D
Citation
Xx. Qu et al., NMR-STUDIES OF HYDROGEN MICROSTRUCTURES IN HYDROGENATED AMORPHOUS-SILICON FILMS, Acta physica Sinica, 3(10), 1994, pp. 730-735
Citations number
NO
Categorie Soggetti
Physics
Journal title
Acta physica Sinica → ACNP
ISSN journal
10003290
Volume
3
Issue
10
Year of publication
1994
Pages
730 - 735
Database
ISI
SICI code
1000-3290(1994)3:10<730:NOHMIH>2.0.ZU;2-3
Abstract
Four kinds of a-Si:H films deposited in the PECVD system with differen t T(s) are studied by H-1 NMR technique. Direct evidence is given to c onfirm hydrogen atoms in the diluted and clustered phases. The local b onding configurations for hydrogen and the density of dangling bonds a re analyzed by ESR and infrared absorption spectroscopy. The behaviour of hydrogen in a-Si:H films is discussed.