I. Ogura et al., A MULTIPLE WAVELENGTH VERTICAL-CAVITY SURFACE-EMITTING LASER (VCSEL) ARRAY FOR OPTICAL INTERCONNECTION, IEICE transactions on electronics, E78C(1), 1995, pp. 22-27
We describe an application of InGaAs/AlGaAs VCSELs to multiple wavelen
gth light source for optical interconnection. A flip-chip bonding tech
nique is used to integrate the VCSELs lasing at different wavelengths.
The integrated VCSELs of different wavelengths are individually grown
and processed, so that one can optimize the device characteristics an
d the wavelength separation or distribution for multiple wavelength in
terconnection systems. A 9-wavelength VCSEL array with a wavelength se
paration of 5 nm has been successfully fabricated.