A MATRIX APPROACH TO GRAZING-INCIDENCE X-RAY-DIFFRACTION IN MULTILAYERS

Citation
Sa. Stepanov et al., A MATRIX APPROACH TO GRAZING-INCIDENCE X-RAY-DIFFRACTION IN MULTILAYERS, Zeitschrift fur Physik. B, Condensed matter, 96(3), 1995, pp. 341-347
Citations number
19
Categorie Soggetti
Physics, Condensed Matter
ISSN journal
07223277
Volume
96
Issue
3
Year of publication
1995
Pages
341 - 347
Database
ISI
SICI code
0722-3277(1995)96:3<341:AMATGX>2.0.ZU;2-C
Abstract
A method for computation of X-ray grazing-incidence diffraction (GID) in multilayers and superlattices is presented. The method is based on X-ray dynamical diffraction theory and a matrix from a boundary equati ons and provides a simple numerical solution of the problem. The appli cation of the method to simulating GID measurements taken from AlAs/Ga As superlattice (20 periods of 14.6 nm AlAs and 6.8 nm GaAs) demonstra tes the principal validity of the theory. A perfect matching between t he theory and the experiment requires the real-structure effects of sa mple to be taken into account.