A MATRIX APPROACH TO GRAZING-INCIDENCE X-RAY-DIFFRACTION IN MULTILAYERS

A method for computation of X-ray grazing-incidence diffraction (GID) in multilayers and superlattices is presented. The method is based on X-ray dynamical diffraction theory and a matrix from a boundary equati ons and provides a simple numerical solution of the problem. The appli cation of the method to simulating GID measurements taken from AlAs/Ga As superlattice (20 periods of 14.6 nm AlAs and 6.8 nm GaAs) demonstra tes the principal validity of the theory. A perfect matching between t he theory and the experiment requires the real-structure effects of sa mple to be taken into account.