REALIZATION IN CLEAN ROOM AND ELECTRICAL CHARACTERIZATION OF MICROELECTRONIC DEVICES BY DESS STUDENTS

These tutorials are addressed to master, DEA or graduate engineer stud ents in the intent to apply the electronic, the microelectronic and th e semiconductors physics Lessons. They relate to the design, the techn ological realization and the characterization of microelectronic compo nents. The masks, of the transistors fabricated in the clean room are designed and developed within the framework of the CNFM. These masks a re at first presented and then observed by scanning electron microscop e in order to prepare the work in the clean room. After fabrication, t he structures are again observed by the scanning electron microscope i n order to show the fabrication quality and the possible defects and t hen they are electrically characterized. These different characterizat ions allow also to compare the physical and electrical parameters of t he components realized by the students with the industrial ones. This comparison shows the technological fabrication difficulties.