MICROELECTRONICS PRACTICAL TRAINING AT EN SERG - PROCESS CHARACTERIZATION VS SIMULATION

Before the return from the foundry and the electrical characterization , a physical characterisation of the materials is carried out by stude nts as part of a series of practical works on microelectronics technol ogy. For this, the followings are required : sheet resistance measurem ent (four-probes method), ellipsometry computerised spreading resistan ce measurement, and ''Alphastep''-type equipment. A technology-simulat ion software (SUPREM3) is used in order to compare the results thus ob tained (sheet resistance, thickness of layers, doping profile) with th e ones achieved by means of the simulation.