AL2CU PRECIPITATE DISTRIBUTION IN ALCU INTERCONNECTS AFTER ELECTROMIGRATION STRESSING - A STUDY BY AUGER MICROSCOPY AND ION-BEAM BEVELLING

Authors
BARKSHIRE IR PRUTTON M
Citation
Ir. Barkshire et M. Prutton, AL2CU PRECIPITATE DISTRIBUTION IN ALCU INTERCONNECTS AFTER ELECTROMIGRATION STRESSING - A STUDY BY AUGER MICROSCOPY AND ION-BEAM BEVELLING, Journal of applied physics, 77(3), 1995, pp. 1082-1085
Citations number
8
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
3
Year of publication
1995
Pages
1082 - 1085
Database
ISI
SICI code
0021-8979(1995)77:3<1082:APDIAI>2.0.ZU;2-V