CHEMICAL AND PHYSICAL SPUTTERING OF FLUORINATED SILICON

Authors
BARONE ME GRAVES DB
Citation
Me. Barone et Db. Graves, CHEMICAL AND PHYSICAL SPUTTERING OF FLUORINATED SILICON, Journal of applied physics, 77(3), 1995, pp. 1263-1274
Citations number
35
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
3
Year of publication
1995
Pages
1263 - 1274
Database
ISI
SICI code
0021-8979(1995)77:3<1263:CAPSOF>2.0.ZU;2-U