STRESSES IN CHEMICAL-VAPOR-DEPOSITED EPITAXIAL 3C-SIC MEMBRANES

Authors
SU CM FEKADE A SPENCER M WUTTIG M
Citation
Cm. Su et al., STRESSES IN CHEMICAL-VAPOR-DEPOSITED EPITAXIAL 3C-SIC MEMBRANES, Journal of applied physics, 77(3), 1995, pp. 1280-1283
Citations number
15
Categorie Soggetti
Physics, Applied
Journal title
Journal of applied physics → ACNP
ISSN journal
00218979
Volume
77
Issue
3
Year of publication
1995
Pages
1280 - 1283
Database
ISI
SICI code
0021-8979(1995)77:3<1280:SICE3M>2.0.ZU;2-5