AN ALGORITHM FOR ANALYZING ELLIPSOMETRIC DATA TAKEN WITH MULTIPLE ANGLES OF INCIDENCE

The equations of ellipsometry are intractable. They have not been inve rted, and thus require numerical techniques for solution in all but th e simplest of reflecting surface configurations. In prior work, the au thors have presented algorithms for creating approximate solutions for these equations in the case of a sequence of measurements being taken at successive times. In this paper, we extend one of these algorithms to the case of readings taken at one time at multiple angles of incid ence. The algorithm is described in some detail, and sample results ar e presented. In addition, statistical means are used to assess the rel iability of the values computed.