P. Scardi et al., LATTICE DISORDER AND TEXTURE IN DIAMOND COATINGS DEPOSITED BY HFCVD ON CO-CEMENTED TUNGSTEN CARBIDE, Thin solid films, 291, 1996, pp. 136-142
Diamond coatings were deposited by hot filament chemical vapour deposi
tion on 5.8 wt.% Co-cemented tungsten carbide (WC-Co). Under the same
deposition conditions, two sets of samples were produced by varying th
e CH4 percentage (0.5 and 1.0%) in the H-2 atmosphere, and changing th
e substrate temperature in the range 650-950 degrees C. The effect of
different CH4 percentage and of temperature on diamond microstructure
was investigated by scanning electron microscopy (SEM) and X-ray diffr
action (XRD). In particular, pole figure measurement and line profile
analysis (LPA) were used to study diamond texture and lattice disorder
, respectively. Diamond grains were not preferentially oriented for de
position temperatures below 800 degrees C. Above this temperature, a [
111] fibre texture developed in samples deposited with 0.5% CH4 in H-2
. The XRD profile broadening indicated a marked increase of lattice di
sorder in the diamond him with increasing deposition temperature. This
observation was correlated with the Raman peak broadening, also attri
buted to lattice disorder effects. A detailed LPA showed a decrease of
crystallite mean size and a corresponding microstrain increase with r
aising temperature, although SEM morphological observations indicated
a progressive grain coarsening at higher deposition temperatures.