HOLOGRAPHIC-INTERFEROMETRY APPLIED TO THE STUDY OF RESIDUAL DEFORMATIONS INDUCED BY A PULSED ION IMPLANTER

The application of holographic interferometry to study the residual de formations induced in steel specimens by a pulsed ion implanter is pre sented. The proposed technique is non-destructive and non-contact. It is based on the use of a fixture which makes it possible to remove the specimen and to put it back into the same position after being implan ted. A numerical model to calculate the residual deformations is evalu ated by comparing with the results obtained holographically. The exper imental behavior correlates with that predicted by the numerical compu tation results.