We report on n-type indium doping of CdTe films grown by molecular bea
m epitaxy on (001) GaAs substrates. By adjusting the flux of In atoms
we can precisely control the carrier concentration over three orders o
f magnitude - from 8 x 10(14) up to 1.3 x 10(18) cm(-3). In agreement
with earlier reports we confirmed that Cd overpressure plays an import
ant role in the doping process. The doping appears to be most effectiv
e for Cd/Te pressure ratio of 1.5. For this value of Cd/Te pressure ra
tio essentially 100% efficiency of doping is achieved at low In concen
trations (< 10(18) cm(-3)). At higher In concentrations acceptor impur
ities compensate shallow donors limiting the concentration of free car
riers.