IN-SITU REAL-TIME MEASUREMENT OF THE INCUBATION-TIME FOR SILICON NUCLEATION ON SILICON DIOXIDE IN A RAPID THERMAL-PROCESS

Authors
HU YZ DIEHL DJ LIU Q ZHAO CY IRENE EA
Citation
Yz. Hu et al., IN-SITU REAL-TIME MEASUREMENT OF THE INCUBATION-TIME FOR SILICON NUCLEATION ON SILICON DIOXIDE IN A RAPID THERMAL-PROCESS, Applied physics letters, 66(6), 1995, pp. 700-702
Citations number
23
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
6
Year of publication
1995
Pages
700 - 702
Database
ISI
SICI code
0003-6951(1995)66:6<700:IRMOTI>2.0.ZU;2-I