LOW-TEMPERATURE DEVICE CREATION IN SI VIA FAST LI ELECTROMIGRATION

Authors
CHERNYAK L LYAKHOVITSKAYA V CAHEN D
Citation
L. Chernyak et al., LOW-TEMPERATURE DEVICE CREATION IN SI VIA FAST LI ELECTROMIGRATION, Applied physics letters, 66(6), 1995, pp. 709-711
Citations number
14
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
6
Year of publication
1995
Pages
709 - 711
Database
ISI
SICI code
0003-6951(1995)66:6<709:LDCISV>2.0.ZU;2-1