V. Golovanov et al., DIFFERENT THICK-FILM METHODS IN PRINTING OF ONE-ELECTRODE SEMICONDUCTOR GAS SENSORS, Sensors and actuators. B, Chemical, 34(1-3), 1996, pp. 401-406
Different thick-film printing techniques have been used for the fabric
ation of one-electrode semiconductor gas sensors in the form of thick
films on insulating alumina substrate. In a typical one-electrode sens
or construction, a thin platinum wire (diameter 20 mu m) spiral is emb
edded inside a sintered oxide semiconductor button. The platinum wire
spiral is replaced by a platinum thick-film resistor in our prototype
sensor, and the oxide semiconductor is screen printed over the platinu
m resistor. Both screen printing and gravure offset printing (pad prin
ting) were used for the printing of platinum thick-film resistors. Tin
dioxide, an n-type semiconductor, was used as the sensing (shunting)
thick-film layer over the platinum resistor, and different amounts of
either silver or antimony were used as additives in SnO2. H2S and CO a
t different concentrations in synthetic air were used to test the resp
onse properties of two different sensor types with, respectively, scre
en-printed and pad-printed platinum thick-film resistors.