Citation
M. Jaegle et K. Steiner, GAS-SENSITIVE GAAS-MESFETS, Sensors and actuators. B, Chemical, 34(1-3), 1996, pp. 543-547
Citations number
23
Categorie Soggetti
Electrochemistry,"Chemistry Analytical","Instument & Instrumentation
Journal title
ISSN journal
09254005
Volume
34
Issue
1-3
Year of publication
1996
Pages
543 - 547
Database
ISI
SICI code
0925-4005(1996)34:1-3<543:GG>2.0.ZU;2-#
Abstract
Gas-sensitive GaAs-MESFETs with catalytic gates have been fabricated.
Gas response of I-V output and transfer characteristics are discussed.
Pd- and Pt-catalysed MESFETs show NO2 and NH3-sensitivity. There is n
o cross sensitivity to H2O, CO, CO2 and CH4 below 100 degrees C operat
ing temperatures. Possible sensor mechanisms are proposed.