MICROFLUIDIC COMPONENTS IN LIGA TECHNIQUE

The transport of small amounts of fluids and gases must be controlled with a view to automated drug dosage, chemical analysis with microsens ors, and hydraulic as well as pneumatic microactuators. Components for microfluidic systems have been developed at Karlsruhe Nuclear Researc h Center which are manufactured by the LIGA technique. Micropumps have been fabricated by combining thermoplastic molding with membrane tech niques. It is envisaged to integrate these micropumps into a module fo r handling gases and liquids. The module can then be coupled with diff erent sensor modules to form microsystems, e.g. for the detection of t oxic chemicals in the environment or for bedside analysis in hospitals . Microvalve systems and fluidic beam amplifiers have been developed f or hydraulic and pneumatic actuators. These devices are capable of con trolling a liquid or gas stream and may be used to steer e.g. instrume nts in a catheter tip for minimally invasive surgery.