The dynamic behavior of microfluid devices like miniaturized diaphragm
pumps, microvalves and flow channels will be discussed. Special inter
est is directed to the dynamics of microminiaturized diaphragm pumps.
A formalism will be given, which allows the evaluation of the interact
ion between these pumps and the connected fluid system. The results of
the simulation will be compared with transient pressure measurements
on pneumatically and electrostatically actuated diaphragm pumps on the
millisecond time scale. It will be outlined how the dynamic behavior
of more complex fluid systems can be described. Hence the hydraulic si
mulation of chemical analysis systems, consisting of several micropump
s, flow channels, sensing and mixing elements becomes possible in the
future.