Sol-gel-derived polyceram materials based on organically modified sili
con and titanium alkoxides have been synthesized in planar waveguide f
orms. They exhibit optical losses as low as < 0.25 dB/cm and refractiv
e indices as high as 1.685, coupled with exceptional ease of processin
g. The optical properties of the films (index of refraction, loss, and
dispersion) are studied as functions of processing and composition, a
nd the influence of chemistry on volume homogeneities and surface roug
hness of the films is investigated.