In this study two methods are described to realize wear and corrosion
resistant surface systems: plasma diffusion treatment (PDT) and plasma
assisted CVD (PACVD). Plasma nitriding, plasma nitrocarburizing and p
lasma boriding are used to treat different kinds of substrates. The ad
vances of PACVD and the development of low temperature PACVD and indus
trial applications of these techniques are explained.