O. Parriaux et al., OPTIMIZATION OF A GRATING DEVICE FOR COUP LING RADIATION IN AND OUT OF A THIN-FILM WAVE-GUIDE ON A SILICON SUBSTRATE, Kvantovaa elektronika, 21(11), 1994, pp. 1090-1092
An analysis is reported of the operation and optimisation of the param
eters of a grating device for coupling radiation in and out of a thin-
film waveguide formed on a silicon substrate. The reflection of light
at the interface between a buffer layer and silicon significantly alte
rs the operation of such a grating coupler. The conditions for maximum
coupling out of radiation into air or into the substrate are obtained
for the TE and TM modes of the thin-film waveguide.