ATOMIC-FORCE MICROSCOPY - A KEY TO DIRECT WAFER BENDING TECHNOLOGY

Authors
WATT VHC MOINPOUR M BOWER R SUNDARARAMAN R
Citation
Vhc. Watt et al., ATOMIC-FORCE MICROSCOPY - A KEY TO DIRECT WAFER BENDING TECHNOLOGY, Journal of materials science letters, 14(2), 1995, pp. 96-98
Citations number
13
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
14
Issue
2
Year of publication
1995
Pages
96 - 98
Database
ISI
SICI code
0261-8028(1995)14:2<96:AM-AKT>2.0.ZU;2-X