THE PROPERTIES OF BARIUM-TITANATE RF-SPUTTERED IN ARGON

The structural, optical and dielectric properties of barium titanate t hin films deposited on water-cooled substrates by RF sputtering in Ar (99.99%) were investigated. Optically thin and thick films for the vis ible spectral region were studied. From the investigations it is concl uded that there are at least two crystalline phases in addition to amo rphous barium titanate in the deposited coatings, and the degree of cr ystallization depends on the film thickness. An electron diffraction s tudy indicated that the film structure resembled that of a known bariu m titanate with a small oxygen deficiency and this was attributed to o xygen loss when sputtering in pure Ar. Copyright (C) 1996 Elsevier Sci ence Ltd.