Silica has been treated in a slurry with several chloromethylsilanes a
nd SiCl4. After treatment, the surfaces were characterized by XPS, DRI
FT and Si-27-MAS NMR. The following reactivity scale was determined: T
MCS > DCDMS > MTCS > TCS. XPS was found to be a very useful technique
to complement NMR and vibrational spectroscopies, mainly from a quanti
tative point of view.