A RELIABLE COMPACT ULTRA-HIGH-VACUUM SCANNING TUNNELING MICROSCOPE

A new ultrahigh vacuum (uhv) scanning funneling microscope (STM) with exchangeable samples and tips is constructed which is compatible with typical surface science techniques. The STM incorporates a number of n ovel features, including an optimized inner vibration isolation system . A tip-to-sample approach is performed by means of a simple, reliable all-mechanical system with only two parts moving in vacuum. The tip i s scanned using a monolithic piezoelectric element. A compact design a llowed to place the entire STM assembly on a single 150 mm outer diame ter uhv flange. The STM has been placed on a side flange of the uhv ch amber equipped with electron spectroscopy technique and sample/tip cle aning and preparation facilities. The performance of the STM is illust rated with images of Si(111) surface.