ON THE ION ENERGY-TRANSFER TO THE SUBSTRATE DURING TITANIUM DEPOSITION IN A HOLLOW CATHODE ARC-DISCHARGE

During titanium layer deposition with a hollow cathode are discharge, the integral energy influx to the substrate has been monitored by meas uring temperature gradients. Discharge power and substrate voltage hav e been varied. Simultaneously, the plasma parameters in front of the s ubstrate were determined by means of Langmuir-probe measurements and e nergy resolved mass spectrometry (plasma monitoring). From the integra l energy influx and the plasma parameters, the contributions of the ch arge carriers and radiation to the substrate heating were calculated. The influence of the ions on the mass density of the layer will be dis cussed.