CATALYTIC PROPERTIES OF THIN-FILMS BY SIMULTANEOUS OBLIQUE SPUTTER-DEPOSITION OF 2 MATERIALS FROM DIFFERENT DIRECTIONS

Catalytic properties of simultaneously obliquely sputter-deposited pla tinum-metal oxide thin films were studied. We attempted to study the e ffect of combination of the metal oxide with platinum on the NO-CO rea ction by minimizing differences in the particle size and the dispersio n of platinum in the samples. Simultaneously obliquely sputter-deposit ed Pt-metal oxide thin film systems gave comparable particle sizes and dispersion of platinum in different combinations of several metal oxi des with platinum. The catalytic property of platinum was changed by t he choice of metal oxide. We found this simultaneous oblique sputter d eposition to be an excellent technique for obtaining a model catalyst suitable for exploring the synergistic catalytic reaction and the role of promoters at the interfaces of different materials, which facilita tes the survey of industrial catalysts.