X. Wang et al., OPTICAL AND MECHANICAL-PROPERTIES OF CARBON NITRIDE FILMS PREPARED BYION-ASSISTED ARE DEPOSITION AND MAGNETRON SPUTTERING, Thin solid films, 256(1-2), 1995, pp. 148-154
Carbon nitride films have been prepared by two different types of coat
ing technique: ion-assisted are deposition and magnetron sputtering. T
he optical properties and microhardness of the formed carbon nitride f
ilms were studied. The results showed that, by both methods, nitrogen
could be incorporated into the films to a maximum N-to-C ratio of 0.5.
The refractive index and reflectance of the films were found to decre
ase as the nitrogen content in the films increased, while the extincti
on coefficient did not change significantly. When the N-2 gas was repl
aced in the deposition process by H-2 gas, the films became more trans
parent. The microhardness of the films was also decreased with increas
ing nitrogen content and decreased further when the nitrogen was incor
porated into films by higher energy N+ ion bombardment. In the magnetr
on sputtering, the sputtering power had a marked effect on the optical
properties of the formed films.