NITROGEN IMPLANTATION INTO POLYIMIDE

The structure of polyimide (Upilex R) implanted with 90 keV N+ ions to the doses from 1 x 10(14) to 10(17) cm-2 were studied by i.r. spectro scopy. Electrical sheet conductivity was also measured using standard two point technique and surface polarity was determined from the measu rement of contact angle. By ion implantation to the dose of 1 x 10(17) cm-2, the polymer conductivity was increased by 10 orders of magnitud e and the surface polarity was shown to be inversely proportional to t he implanted dose. The degradation reaction by which the imide group i s transformed into amine group is described. The measurements of resis tivity vs temperature dependence indicate charge transport via variabl e range hopping mechanism.