The possibility of cleaning the optical surfaces of quartz and glass a
rticles in vacuum with a continuous ray of a CO2 laser is examined the
oretically and experimentally. Calculations for nonsteady-state heatin
g of the samples ensured that the time taken by the surface to pass th
rough the beam, the radiation density, and the overall time needed for
cleaning were optimized. A comparison of the surface profiles of the
samples showed that the optical properties of the surface could be imp
roved substantially.