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ITA
ENG
EXCIMER-LASER ASSISTED CHEMICAL MACHINING OF SIC CERAMIC
Authors
HIBI Y
ENOMOTO Y
KIKUCHI K
SHIKATA N
OGISO H
Citation
Y. Hibi et al., EXCIMER-LASER ASSISTED CHEMICAL MACHINING OF SIC CERAMIC, Applied physics letters, 66(7), 1995, pp. 817-818
Citations number
4
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters
→
ACNP
ISSN journal
00036951
Volume
66
Issue
7
Year of publication
1995
Pages
817 - 818
Database
ISI
SICI code
0003-6951(1995)66:7<817:EACMOS>2.0.ZU;2-F