PREANNEALING EFFECTS ON CARRIER CONCENTRATION PROFILE AFTER AU DIFFUSION IN SI

Authors
MONSON TK VANVECHTEN JA ZHANG QS
Citation
Tk. Monson et al., PREANNEALING EFFECTS ON CARRIER CONCENTRATION PROFILE AFTER AU DIFFUSION IN SI, Applied physics letters, 66(7), 1995, pp. 854-856
Citations number
12
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
7
Year of publication
1995
Pages
854 - 856
Database
ISI
SICI code
0003-6951(1995)66:7<854:PEOCCP>2.0.ZU;2-M