The evaluation of thermal and electrical properties has been demonstra
ted using a scanning force microscope under ambient air condition. For
the first time, the investigation of thermal conductivity on a chemic
al vapor deposited (CVD) grown diamond surface has been performed with
a lateral resolution below 200 nm. Depending on the growing parameter
s, structures consisting of lines of different thicknesses and spacing
s are visible. The determination of the electrical structure has been
carried out with a resolution of 2 nm using the contact current mode (
CCM) showing similar structures. The thermal images exhibit a high the
rmal conductivity mostly on the diamond crystals whereas the electrica
l conductivity reached its highest values between them.