QUANTITATIVE-ANALYSIS OF NONSTOICHIOMETRI C TITANIUM NITRIDE FILMS

Authors
STOCK HR HOHL F MAYR P
Citation
Hr. Stock et al., QUANTITATIVE-ANALYSIS OF NONSTOICHIOMETRI C TITANIUM NITRIDE FILMS, Materialwissenschaft und Werkstofftechnik, 26(1), 1995, pp. 27-31
Citations number
12
Categorie Soggetti
Material Science
Journal title
Materialwissenschaft und Werkstofftechnik → ACNP
ISSN journal
09335137
Volume
26
Issue
1
Year of publication
1995
Pages
27 - 31
Database
ISI
SICI code
0933-5137(1995)26:1<27:QONCTN>2.0.ZU;2-8