The chemisorption of benzoic acid (C6H5-COOH) and aniline (C6H5-NH2) o
n Si(100)-2x1 at room temperature has been studied with high resolutio
n electron energy loss spectroscopy (HREELS) and low electron energy d
iffraction (LEED). The vibrational data indicate that both aromatic sp
ecies adsorb dissociatively on Si(100)-2x1 via a deprotonation reactio
n of the functional group. A Si-O-C or SI-N-C linkage, respectively, i
s formed between the silicon substrate, still reconstructed, and the i
ntact phenyl ring. In both cases, the hydrogen atom bonds to a neighbo
uring silicon atom.