R. Whiting et al., EVALUATION OF ELASTIC-MODULI IN THIN-FILM SUBSTRATE SYSTEMS BY THE 2-LAYER VIBRATING REED METHOD, Materials science & engineering. B, Solid-state materials for advanced technology, 30(1), 1995, pp. 35-38
A theoretical analysis for the two-layer vibrating reed method as appl
ied to study of thin films is reported. The experimental factors which
affect the reliability of experimental results derived using this met
hod are discussed. Illustrative data obtained for copper and silver fi
lms are presented.