2-DIMENSIONAL MODEL OF A CAPACITIVELY COUPLED RF DISCHARGE AND COMPARISONS WITH EXPERIMENTS IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCEREACTOR

Authors
BOEUF JP PITCHFORD LC
Citation
Jp. Boeuf et Lc. Pitchford, 2-DIMENSIONAL MODEL OF A CAPACITIVELY COUPLED RF DISCHARGE AND COMPARISONS WITH EXPERIMENTS IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCEREACTOR, Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics, 51(2), 1995, pp. 1376-1390
Citations number
72
Categorie Soggetti
Physycs, Mathematical","Phsycs, Fluid & Plasmas
Journal title
Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics → ACNP
ISSN journal
1063651X
Volume
51
Issue
2
Year of publication
1995
Pages
1376 - 1390
Database
ISI
SICI code
1063-651X(1995)51:2<1376:2MOACC>2.0.ZU;2-R