FABRICATION OF ULTRATHIN METALLIC MEMBRANES ON CERAMIC SUPPORTS BY SPUTTER-DEPOSITION

The present work focuses on the synthesis of ultrathin palladium films (< 500 nm) grown on porous ceramic supports by the sputter deposition technique. The following two parameters were found most critical to t he synthesis of the gas-tight metal-ceramic composite: substrate type (surface roughness) and the deposition temperature. Fairly gas-tight P d films with good adhesion could be coated on sol-gel derived fine por e gamma-alumina supports but not on coarse alpha-alumina supports. Poo r adhesion between the coated film and the gamma-alumina support was o bserved for films coated at room temperature, to a thickness of 300 nm or larger. Both coating temperature (80-600 degrees C) and substrate type affect the grain size, nitrogen gas-tightness and the adhesion of the deposited metallic films. Characterization results show that 400 degrees C is the optimum coating temperature. XRD and SEM data on thes e films show that the films are fairly crystalline, with a uniform and smooth surface morphology.