TOTAL-REFLECTION X-RAY-FLUORESCENCE SPECTROSCOPY USING SYNCHROTRON-RADIATION FOR WAFER SURFACE TRACE IMPURITY ANALYSIS

PIANETTA P TAKAURA N BRENNAN S TOMPKINS W LADERMAN SS FISCHERCOLBRIE A SHIMAZAKI A MIYAZAKI K MADDEN M WHERRY DC KORTRIGHT JB

P. Pianetta et al., TOTAL-REFLECTION X-RAY-FLUORESCENCE SPECTROSCOPY USING SYNCHROTRON-RADIATION FOR WAFER SURFACE TRACE IMPURITY ANALYSIS, Review of scientific instruments, 66(2), 1995, pp. 1293-1297

9

Physics, Applied","Instument & Instrumentation

Review of scientific instruments → ACNP

00346748

66

2

1995

2

1293 - 1297

ISI

0034-6748(1995)66:2<1293:TXSUS>2.0.ZU;2-Q