HELICON PLASMA SPUTTERING SYSTEM FOR FABRICATION OF MULTILAYER X-RAY MIRRORS

Authors
KOIKE M CHIWAKI M SUZUKI IH KOBAYASHI N
Citation
M. Koike et al., HELICON PLASMA SPUTTERING SYSTEM FOR FABRICATION OF MULTILAYER X-RAY MIRRORS, Review of scientific instruments, 66(2), 1995, pp. 2141-2143
Citations number
8
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
66
Issue
2
Year of publication
1995
Part
2
Pages
2141 - 2143
Database
ISI
SICI code
0034-6748(1995)66:2<2141:HPSSFF>2.0.ZU;2-7