AT-WAVELENGTH METROLOGY OF 13-NM LITHOGRAPHY IMAGING OPTICS

Authors
TAN ZQ MACDOWELL AA LAFONTAINE B BJORKHOLM JE TENNANT D TAYLOR D HIMEL M FREEMAN RR WASKIEWICZ WK WINDT DL SPECTOR S RAYCHAUDHURI AK STULEN RH NG W CERRINA F
Citation
Zq. Tan et al., AT-WAVELENGTH METROLOGY OF 13-NM LITHOGRAPHY IMAGING OPTICS, Review of scientific instruments, 66(2), 1995, pp. 2241-2243
Citations number
9
Categorie Soggetti
Physics, Applied","Instument & Instrumentation
Journal title
Review of scientific instruments → ACNP
ISSN journal
00346748
Volume
66
Issue
2
Year of publication
1995
Part
2
Pages
2241 - 2243
Database
ISI
SICI code
0034-6748(1995)66:2<2241:AMO1LI>2.0.ZU;2-I