MICROSTRUCTURE OF POLYCRYSTALLINE SILICON FILMS OBTAINED BY COMBINED FURNACE AND LASER ANNEALING

Authors
CARLUCCIO R STOEMENOS J FORTUNATO G MEAKIN DB BIANCONI M
Citation
R. Carluccio et al., MICROSTRUCTURE OF POLYCRYSTALLINE SILICON FILMS OBTAINED BY COMBINED FURNACE AND LASER ANNEALING, Applied physics letters, 66(11), 1995, pp. 1394-1396
Citations number
10
Categorie Soggetti
Physics, Applied
Journal title
Applied physics letters → ACNP
ISSN journal
00036951
Volume
66
Issue
11
Year of publication
1995
Pages
1394 - 1396
Database
ISI
SICI code
0003-6951(1995)66:11<1394:MOPSFO>2.0.ZU;2-B