Diamond particles and films were grown on graphite substrates using ho
t-filament CVD method with a pure hydrogen feed. After deposition, gra
phite substrates showed strong etching effects. A trough of 1 mm deep
and 4-5 mm wide was formed in the graphite opposite to the filament. S
canning electron microscopy and micro-Raman spectrum demonstrate that
diamond has grown both inside and near the edge of the trough. The res
ults are discussed with respect to the possible precursors of diamond
deposition and the effect of atomic hydrogen interaction with graphite
substrates.