NANOTECHNOLOGY AND SURFACE-ANALYSIS USING SCANNING PROBE MICROSCOPY

In the field of layer technology processes, the production of well-def ined material surfaces is becoming ever more important. Requirements i n terms of materials quality are becoming more demanding as smaller an d smaller structures and layer thicknesses are introduced. Scanning pr obe microscopy permits these vital parameters to be determined with a high degree of resolution. In addition, it is becoming a tool for the processing of materials with ultra-fine surface structures.