CHEMICAL-VAPOR-DEPOSITION OF SILICON-CARBIDE BY PYROLYSIS OF METHYLCHLOROSILANES

Authors
CHOI BJ PARK DW KIM DR
Citation
Bj. Choi et al., CHEMICAL-VAPOR-DEPOSITION OF SILICON-CARBIDE BY PYROLYSIS OF METHYLCHLOROSILANES, Journal of materials science letters, 16(1), 1997, pp. 33-36
Citations number
14
Categorie Soggetti
Material Science
Journal title
Journal of materials science letters → ACNP
ISSN journal
02618028
Volume
16
Issue
1
Year of publication
1997
Pages
33 - 36
Database
ISI
SICI code
0261-8028(1997)16:1<33:COSBPO>2.0.ZU;2-J