Ms. Yeh et al., THE SENSITIVITY OF THE COMMON FOCUS ERROR OF A REFERENCE LENS ON THE MEASUREMENT ACCURACY IN A FIZEAU INTERFEROMETER, J. mod. opt., 44(1), 1997, pp. 203-208
A technique used to examine the performance of reference lens of inter
ferometer is described. The defects in the reference lens that are pri
marily due to the manufacturing errors or the assembly errors or both
will result in the common focus error of reference lens at the centre
of curvature of reference surface, which affects the measurement accur
acy. The optical path difference between the reference wave front and
the test wave front at the exit pupil is applied to analyse the influe
nce of common focus error of reference lens on the measurement errors.
A comparison of the experimental result with the numerical analysis i
s made.